•適用材料:8”Wafer Ring、8”Wafer Ring Cassette
•設備速度:≦240pcs (Index time:15sec/Curing time:depends)
•機台尺寸:長:1300mm ,寬:1300mm ,高:2100mm
•設備電力:AC 220V,single phase,30a,50/60Hz
•設備空氣源:5 kg/cm2
•控制系統:PC+PLC
•光源:LED UV Lamp
•波長:Range 365~385nm/Peak value 375nm
•LED 功率消耗:880W/head
•led uv強度:0-100% adjustable
•冷卻方式:By air
•燈源使用壽命約10,000~15,000小時，照射範圍可客製化